Polishing of YBa2Cu3O7−y by He-ion etching

Abstract
Clean polishing is performed by helium‐ion etching on a surface of high‐Tc YBa2Cu3O7−y. Based on a knock‐on cascade model, the decrease of surface roughness is discussed. A rate process of etching is applied for the surface roughness of the high‐Tc YBa2Cu3O7−y.

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