Abstract
Many dislocations were found to be induced when GaAs chips for Gunn diodes were mounted on a heat sinking stud by a thermocompression bonding method. By introducing dislocations into epitaxial GaAs with a bending method, dislocations were confirmed to behave as acceptors in GaAs. Degradation or increase of the low field resistance of a Gunn diode by thermocompression bonding is considered to be due to induced dislocations.

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