Structural studies of sputtered a-Si:H films in a high resolution analytical stem
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 225-228
- https://doi.org/10.1016/0022-3093(83)90562-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Formulae for light-element micro analysis by electron energy-loss spectrometryUltramicroscopy, 1978
- Amorphous germanium II. Structural propertiesAdvances in Physics, 1973
- Evidence of Voids Within the As-Deposited Structure of Glassy SiliconPhysical Review Letters, 1969