Characteristics of a hermetic 6H-SiC pressure sensor at 600 C
- 22 August 2001
- conference paper
- Published by American Institute of Aeronautics and Astronautics (AIAA)
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- An aluminum nitride package for 600°C and beyondPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface Morphology and Chemistry of 4H- and 6H-SiC after Cyclic OxidationMaterials Science Forum, 2002
- Material System for Packaging 500°C SiC MicrosystemsMRS Proceedings, 2001
- Stable Ti/TaSi2/Pt Ohmic Contacts on N-Type 6H-SiC Epilayer at 600°C in AirMRS Proceedings, 2000