Silicon RF Power Sensor from DC to Microwave
- 1 January 1990
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Thermal sensors based on the seebeck effectSensors and Actuators, 1986
- Electrochemically Thinned N/N+ Epitaxial Silicon—Method and ApplicationsJournal of the Electrochemical Society, 1971
- Electrochemically Controlled Thinning of SiliconBell System Technical Journal, 1970