MeV Helium Microbeam Analysis: Applications to Semiconductor Structures
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Developments on the Melbourne scanning proton microprobePublished by Elsevier ,2002
- Microprobes and their application to PIXE analysisNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Channeling contrast microscopy: Application to semiconductor structuresApplied Physics Letters, 1983