A collimation mirror in polymeric planar waveguide formed by reactive ion etching
- 28 February 2003
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 15 (3) , 422-424
- https://doi.org/10.1109/LPT.2003.808757
Abstract
We fabricated and characterized an integrated optical mirror in a polymeric waveguide. A parabola-shaped cavity is etched in fluorinated polyimide using oxygen reactive ion etching. The vertically etched sidewall of the planar waveguide works as a highly reflecting total-internal-reflection mirror, which collimates a diverging beam from its focus. The estimated mirror insertion loss of the demonstrated device is 2.4 dB or less.Keywords
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