Preparation of Pyroelectric Pb1-xLaxTi1-x/4O3 Thin Films from Ceramic Target by RF Magnetron Sputtering
- 1 March 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (3B) , L443
- https://doi.org/10.1143/jjap.33.l443
Abstract
Pyroelectric Pb1- x La x Ti1- x /4O3 thin films of high quality have been obtained reproducibly by rf magnetron sputtering using a ceramic target. The effects of sputtering parameters on film composition and structure have been studied and related to plasma emission spectroscopy. By controlling the relative intensities of Pb* (406 nm) and Ti* (396 nm) emissions of the plasma, the sputtering conditions were optimized to produce stoichiometric and highly c-axis-oriented filins. Under stabilized conditions, use of the ceramic target offered stability of the plasma and a high deposition rate of 2 Å/s. The PLT film exhibited good pyroelectric parameters with a dielectric constant of 290 and a pyroelectric coefficient of 4.2×10-8 C/cm2· K.Keywords
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