Evaluation of atomic displacement in ion implanted GaAs
- 1 March 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 85 (1) , 607-610
- https://doi.org/10.1016/0168-583x(94)95891-2
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Axial dechannelingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Monte Carlo Channeling CalculationsPhysical Review B, 1971
- Analytic Independent-Particle Model for AtomsPhysical Review B, 1969