Parameter correlation and precision in multiple-angle ellipsometry
- 1 September 1981
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 20 (17) , 3020-3026
- https://doi.org/10.1364/ao.20.003020
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 3 references indexed in Scilit:
- Applicability of multiple angle of incidence ellipsometry (MAI). Measurements to GaAs anodic oxide and GaP anodic oxide systems at the wavelength 632.8 nmCrystal Research and Technology, 1978
- Parameter-Correlation and Computational Considerations in Multiple-Angle Ellipsometry*Journal of the Optical Society of America, 1971
- An Algorithm for Least-Squares Estimation of Nonlinear ParametersJournal of the Society for Industrial and Applied Mathematics, 1963