Geometrically Exact Ellipsometer Alignment

1 May 1971

journal article
Published by Optica Publishing Group in Applied Optics

Vol. 10 (5) , 1024-1030
https://doi.org/10.1364/ao.10.001024

Abstract

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This publication has 4 references indexed in Scilit:

Geometrically Exact Monochromator Alignment
Review of Scientific Instruments, 1970
The effects of polarizer ellipticity on ellipsometry measurements
Surface Science, 1970
Method for calibrating the analyser and the polarizer in an ellipsometer
Journal of Physics D: Applied Physics, 1969
Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry
Journal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963