MeV ion beam lithography of PMMA
- 1 May 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 77 (1-4) , 169-174
- https://doi.org/10.1016/0168-583x(93)95540-l
Abstract
No abstract availableKeywords
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