Ion-cleaning damage in (100) GaAs, and its effect on schottky diodes
- 28 February 1983
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 26 (2) , 125-129
- https://doi.org/10.1016/0038-1101(83)90113-2
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Schottky barriers on ordered and disordered surfaces of GaAs(110)Journal of Vacuum Science and Technology, 1978
- Abstract: Composition changes in GaAs due to low-energy ion bombardmentJournal of Vacuum Science and Technology, 1978
- A review of etching and defect characterisation of gallium arsenide substrate materialThin Solid Films, 1976
- Application of AES to the study of selective sputtering of thin filmsJournal of Vacuum Science and Technology, 1976
- Ion-Beam Techniques for Device FabricationJournal of Vacuum Science and Technology, 1971