Abstract
The L-subshell ionization cross sections for tungsten have been measured for incident electron beams of low energies. The electron energy was in the range of 1<EILi4. The values of the three L-subshell cross sections σL1, σL2, and σL3 were deduced from the thick-target yields of Lβ3, Lβ1, and Lα1 x rays of tungsten. A differential method was employed in the deduction procedures. The x-ray spectra were obtained by an improved version of a single-crystal, high-angle goniometer. The shape of the energy dependence of the measured cross sections deviates from the predictions given by McGuire's scaling result as well as Gryzinski's classical scaling result.