High current density, broad beam ion implantation
- 15 August 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 116, 215-220
- https://doi.org/10.1016/0921-5093(89)90149-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The development and application of an ion implanter based on ion thruster technologyVacuum, 1986
- Summary Abstract: Nitrogen ion implantation for wear applications: A reviewJournal of Vacuum Science & Technology A, 1985
- Ion implantation into metals and cabridesThin Solid Films, 1978