The development and application of an ion implanter based on ion thruster technology
- 1 January 1986
- Vol. 36 (1-3) , 5-9
- https://doi.org/10.1016/0042-207x(86)90259-9
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Ion extraction from a plasmaJournal of Applied Physics, 1981
- Ion implantation into metals and cabridesThin Solid Films, 1978
- Optimization of an electron-bombardment ion source for ion machining applicationsJournal of Vacuum Science and Technology, 1975
- An Experimental Investigation of a High-Voltage Electron-Bombardment Ion ThrusterJournal of the Electrochemical Society, 1969
- Experimental investigation of a 1.5-m-diam Kaufman thruster.Journal of Spacecraft and Rockets, 1968