Investigations on chip-internal current contrast imaging and measurement using an electron beam tester
- 31 March 1992
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 16 (1-4) , 173-182
- https://doi.org/10.1016/0167-9317(92)90337-q
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Quiescent power supply current measurement for CMOS IC defect detectionIEEE Transactions on Industrial Electronics, 1989
- An in-the-lens spectrometer for high performance E-beam testingMicroelectronic Engineering, 1987
- Simple calculation of energy distribution of low-energy secondary electrons emitted from metals under electron bombardmentJournal of Applied Physics, 1974