Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
- 3 July 2004
- journal article
- research article
- Published by American Chemical Society (ACS) in Langmuir
- Vol. 20 (16) , 6871-6878
- https://doi.org/10.1021/la048827k
Abstract
Nanotransfer printing represents an additive approach for patterning thin layers of solid materials with nanometer resolution. The surface chemistries, thin film deposition techniques, and stamp designs are all important for the proper operation of this method. This paper presents some details concerning processing procedures and other considerations needed for patterning two- and three-dimensional nanostructures with low density of defects and minimal distortions.Keywords
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