InP-HEMT MMICs for passive millimeter-wave imaging sensors

Abstract
This paper describes InP-HEMT MMICs for 94 GHz band passive millimeter-wave (PMMW) imaging sensors. In order to obtain high sensitivity with a single MMIC, we developed a new structure in MMIC to suppress unwanted feedback power that causes amplifier instability. The structure is also suited for flip chip bonding (FCB). The measured sensitivity of the MMIC was over 500,000 V/W at the frequency of 94 GHz. We also developed the RF front-end of the PMMW imager by mounting the MMIC on an antenna substrate by FCB assembly. In addition, we demonstrated examples of a millimeter-wave image acquired by the PMMW imager.

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