Ion beam deposited carbon nitride films: characterization and identification of chemical sputtering
- 1 December 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 290-291, 107-111
- https://doi.org/10.1016/s0040-6090(96)09061-x
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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