Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation
- 1 March 1991
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (5) , 2904-2908
- https://doi.org/10.1063/1.348600
Abstract
A comparison of experimental measurements and numerical calculations of temporal and spatial sheath evolution is presented. Spherical targets of copper and stainless steel (radius=2 cm) and a cylindrical target (radius=0.95 cm, height=18 cm) were immersed in an argon plasma with plasma densities of 2×108–8×109 cm−3 and biased negatively (20–50 kV). A Langmuir probe was used to detect the propagating sheath edge. Experimental measurements of sheath edge position were in good agreement with those determined by numerical calculations.This publication has 12 references indexed in Scilit:
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