Study of the chemical and morphological evolution of the GaAs surface after high fluence focused ion beam exposure
- 26 November 2003
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 217 (3) , 402-408
- https://doi.org/10.1016/j.nimb.2003.11.010
Abstract
No abstract availableKeywords
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