Ion enhanced film bonding
- 1 June 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 60 (2) , 231-236
- https://doi.org/10.1016/0040-6090(79)90193-7
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Control of Film Properties by rf-Sputtering TechniquesJournal of Vacuum Science and Technology, 1971
- The cleaning of glass in a glow dischargeBritish Journal of Applied Physics, 1958