Two dimensional plotting of semiconductor resistivity by scanning electron microscope
- 1 February 1977
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 20 (2) , 105-110
- https://doi.org/10.1016/0038-1101(77)90057-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Formation and nature of swirl defects in siliconApplied Physics A, 1975
- Striations als ursache von knickstellen in pn-//übergängen von leistungsbauelementenSolid-State Electronics, 1974
- A Spreading Resistance Technique for Resistivity Measurements on SiliconJournal of the Electrochemical Society, 1966