Low-pressure vapor-phase epitaxy of silicon on porous silicon
- 30 September 1988
- journal article
- Published by Elsevier in Materials Letters
- Vol. 7 (3) , 94-98
- https://doi.org/10.1016/0167-577x(88)90132-2
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- A study of silicon MBE on porous silicon substratesJournal of Vacuum Science & Technology B, 1985
- X-ray topographic characterization of porous silicon layersJournal of Crystal Growth, 1984
- Microstructure of Porous silicon and its evolution with temperatureMaterials Letters, 1984