Analysis of porous silicon
- 1 June 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 9 (3) , 317-320
- https://doi.org/10.1016/0168-583x(85)90757-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Dielectric isolation techniques for integrated circuitsMicroelectronics Reliability, 1976
- Formation and Properties of Porous Silicon and Its ApplicationJournal of the Electrochemical Society, 1975
- Anodic dissolution of silicon in hydrofluoric acid solutionsSurface Science, 1966
- Investigation of the chemical properties of stain films on silicon by means of infrared spectroscopySurface Science, 1965