Analysis of Heavy-Ion Sputtering Based on the Shock Wave Model
- 16 October 1983
- journal article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 79 (2) , 395-401
- https://doi.org/10.1002/pssa.2210790209
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- The S n3/2 dependence of non-linear sputtering yieldsRadiation Effects, 1982
- An analytical formula and important parameters for low-energy ion sputteringJournal of Applied Physics, 1980
- Sputtering of silver by heavy atomic and molecular ion bombardmentNuclear Instruments and Methods, 1980
- Energy dependence of the molecular effect in sputteringRadiation Effects, 1980
- Spike effects in heavy-ion sputtering of Ag, Au and Pt thin filmsSurface Science, 1979
- Nonlinear sputtering effects in thin metal filmsApplied Physics Letters, 1979
- The energy dependence of gold selfsputteringNuclear Instruments and Methods, 1976
- Sputtering-yield studies on silicon and silver targetsRadiation Effects, 1973
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961