Angular distributions of sputtered atoms for low-energy heavy ions, medium ions and light ions
- 1 March 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 13 (1-3) , 393-395
- https://doi.org/10.1016/0168-583x(86)90535-5
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Sputtering studies with the Monte Carlo Program TRIM.SPApplied Physics A, 1984
- Computer studies of the energy spectra and reflection coefficients of light ionsRadiation Effects, 1983
- Computer simulation of atomic-displacement cascades in solids in the binary-collision approximationPhysical Review B, 1974
- Computer simulation of sputtering IIRadiation Effects, 1973
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969