Photoelastic waveguides in silicon
- 15 August 1996
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 32 (17) , 1577-1579
- https://doi.org/10.1049/el:19961044
Abstract
Singlemode photoelastic waveguides with losses of ~16 dB/cm-1 at a wavelength of 1.523 µm in bulk silicon, using Si3N4 stressor layers on the sample surface, are reported.Keywords
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