Reactive low voltage ion plating of aluminium nitride films and their characteristics
- 1 February 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 257 (1) , 116-124
- https://doi.org/10.1016/0040-6090(94)06348-6
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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