Optical properties and stress of ion-assisted aluminum nitride thin films
- 1 November 1992
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 31 (31) , 6734-6740
- https://doi.org/10.1364/ao.31.006734
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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