Compact, high-displacement piezoelectric actuator with potential micromechanical applications
- 4 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 1191-1195
- https://doi.org/10.1109/ultsym.1990.171550
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Dynamic piezoelectric translation devicesReview of Scientific Instruments, 1987
- A scanning tunneling microscope for the investigation of the growth of metal films on semiconductor surfacesIBM Journal of Research and Development, 1986