Silicon Layers Grown on Patterned Substrates by Liquid Phase Epitaxy
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Modification of silicon properties with lasers, electron beams, and incoherent lightCritical Reviews in Solid State and Materials Sciences, 1984
- Graphite-strip-heater zone-melting recrystallization of Si filmsJournal of Crystal Growth, 1983
- Growth Process of Silicon Over SiO2 by CVD: Epitaxial Lateral Overgrowth TechniqueJournal of the Electrochemical Society, 1983
- Patterned silicon molecular beam epitaxy with submicron lateral resolutionApplied Physics Letters, 1982
- Low temperature liquid phase epitaxy of siliconJournal of Crystal Growth, 1982
- Nucleation-controlled overgrowth of silicon on silicaApplied Physics Letters, 1980