Generation and Evaluation of Post-Heated Zinc and Selenium Molecular Beams
- 1 August 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (8A) , L1106
- https://doi.org/10.1143/jjap.32.l1106
Abstract
We report the details of a post-heating cell developed to obtain high-velocity molecular beams. Zn and Se molecular beams generated from this cell are evaluated by measuring deposition rate by means of a quartz thickness monitor. The observed deposition rates are analyzed by means of a simple model for the operation of an ionization gauge. We found that Zn atoms have a thermal velocity determined by the temperature at the post-heating zone, and that Se molecules are thermally cracked.Keywords
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