Reduction in macroparticles during the deposition of TiN films prepared by arc ion plating
- 1 December 1990
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 43-44, 312-323
- https://doi.org/10.1016/0257-8972(90)90084-p
Abstract
No abstract availableKeywords
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