Stress relaxation in thin aluminium films
- 16 August 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 130 (1-2) , 87-93
- https://doi.org/10.1016/0040-6090(85)90298-6
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Effects of humidity on stress in thin silicon dioxide filmsJournal of Applied Physics, 1982
- Comments on Aleck’s Stress Distribution in Clamped PlatesJournal of Applied Mechanics, 1981
- The temperature dependence of stresses in aluminum films on oxidized silicon substratesThin Solid Films, 1978
- Recent developments in the study of mechanical properties of thin filmsThin Solid Films, 1972
- Thermal Stresses in a Rectangular Plate Clamped Along an EdgeJournal of Applied Mechanics, 1949