Influence of the SOI Surface Morphology on Crystal Orientation and Device Characteristics
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A three-dimensional static RAMIEEE Electron Device Letters, 1986
- Growth of large areas of grain boundary-free silicon-on-insulatorElectronics Letters, 1983