Transformation of microcrystalline state of hydrogenated silicon to amorphous one due to presence of more electronegative impurities
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 791-794
- https://doi.org/10.1016/0022-3093(83)90289-2
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Hydrogenated crystalline silicon fabricated at low-substrate temperatures by reactive sputtering in He-H2 atmosphereSolid State Communications, 1981