Hydrogenated crystalline silicon fabricated at low-substrate temperatures by reactive sputtering in He-H2 atmosphere
- 1 October 1981
- journal article
- Published by Elsevier in Solid State Communications
- Vol. 40 (2) , 161-164
- https://doi.org/10.1016/0038-1098(81)90158-7
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- Structural interpretation of the vibrational spectra of-Si: H alloysPhysical Review B, 1979
- Infrared vibrational spectra of rf-sputtered hydrogenated amorphous siliconPhysical Review B, 1978