Formation of Thin Polymer Films by Electron Bombardment
- 1 September 1960
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 31 (9) , 1680-1683
- https://doi.org/10.1063/1.1735915
Abstract
Thin insulating films, less than 100 A thick to a few thousand angstroms, were produced by bombarding a substrate with electrons in the presence of silicone oil vapor. The rate of deposition of the solid film was found to depend on the substrate temperature, electron beam current density, and oil vapor pressure. A theoretical expression for the rate is given which agrees satisfactorily with the experimental data. The films which were produced had excellent electrical insulating properties.This publication has 7 references indexed in Scilit:
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