Incorporation of nitrogen in sputtered carbon films
- 30 June 1996
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 81 (2-3) , 262-268
- https://doi.org/10.1016/0257-8972(95)02534-0
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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