Novel infrared detector based on a tunneling displacement transducer
- 7 October 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (15) , 1820-1822
- https://doi.org/10.1063/1.106209
Abstract
The pneumaticinfrared detector [M. J. E. Golay, Rev. Sci. Instrum. 18, 347 (1947)] uses thermal expansion of a gas to detectinfrared radiation. We have designed a detector based on this principle, but which is constructed entirely from micromachined silicon, and uses an electron tunneling displacement transducer to detect the expansion of the gas. The design, fabrication, and characterization of the first prototype sensor are described. Its sensitivity is competitive with the best available uncooled infrared detectors.Keywords
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