Sub-Half-Micron Periodic Structures on Polymer Surfaces with Polarized Laser Irradiation
- 1 December 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (12S) , 6182-6184
- https://doi.org/10.1143/jjap.32.6182
Abstract
A quarter-micron space-and-width linear periodic structures and an array of dot images are obtained with the Nd:YAG 4th harmonic laser irradiation on Kapton polyimide films, poly(ethylene terephthalate) films, spin-coated polyimide films and others. Our solid state Nd:YAG laser source is different from the excimer laser irradiation, in that it provides polarized beams without the need for a polarizer. Atomic force microscope (AFM) and scanning electron microscope (SEM) studies have been carried out. X-ray photoelectron spectroscopy (XPS) studies of laser-exposed areas indicate that no significant chemical reactions took place on exposed areas.Keywords
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