Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3single crystals
- 19 December 2001
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (1) , 53-57
- https://doi.org/10.1088/0960-1317/12/1/308
Abstract
We report on a novel route for fabrication of micro-cantilevers in ferroelectric single-crystal lithium niobate (LiNbO3). Using the sequential techniques of photolithographic patterning, electric field poling, direct bonding and domain-oriented differential etching, free-standing cantilevers of dimensions 50 μm × 50 μm × 5 mm in the x, z and y crystallographic directions, respectively, have been fabricated.Keywords
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