Growth of (111) GaAs on (111) Si using molecular-beam epitaxy

Abstract
(111) GaAs layers have been grown epitaxially on (111) Si wafers, both on-axis as well as 3° off-axis towards the 11̄0 direction, using molecular-beam epitaxy. The grown layers have been characterized by scanning electron microscopy, x-ray diffraction, and transmission electron microscopy.