Residual strains in amorphous silicon films measured by x-ray double crystal topography
- 15 January 1984
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 55 (2) , 375-377
- https://doi.org/10.1063/1.333083
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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