A miniature microwave detector using advanced micromachining
- 2 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
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- Silicon fusion bonding for fabrication of sensors, actuators and microstructuresSensors and Actuators A: Physical, 1990
- The mechanism of anisotropic, electrochemical silicon etching in alkaline solutionsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990