Semiconductor Instability Failure Mechanisms Review
- 1 August 1980
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Reliability
- Vol. R-29 (3) , 237-249
- https://doi.org/10.1109/tr.1980.5220810
Abstract
This paper reviews the mechanisms of semiconductor instabilities for the purpose of better understanding this very complex phenomenon. As a result of this understanding, the semiconductor instabilities can be kept to a minimum in design and production. The basic ideas, diagrams, and references are presented for: instabilities due to surface charge on the silicon dioxide (SiO2), conduction on oxide surfaces/lateral charge spreading, instabilities caused by charges within the SiO2, instabilities in double-layer insulator structures, hFF degradation by avalanched emitter-base junction, and instabilities due to parasitic actions. A case study in reducing manufacturing assembly fallout is presented. Its electrical manifestations, as hFF degradation, the causes and corrective action are described. This study shows the importance of vendor-user cooperation to find the proper corrective action. Electrical diagnostic techniques such as the current-voltage curve trace characteristics of a junction are reviewed. The threshold test used in detecting parasitic MOS action caused by improper layout and/or ionic contamination is presented. They are used to pinpoint the area of instability on the semiconductor. High temperature bake and biased operating life procedures and their use in identifying and pinpointing causes of instabilities are discussed. Finally a method for removing various materials and/or layers of a semiconductor device is presented. This method is used in pinpointing the manufacturing step which might have caused the observed abnormal electrical characteristics.Keywords
This publication has 21 references indexed in Scilit:
- A New Electrostatic Discharge Failure Mode8th Reliability Physics Symposium, 1978
- Effects of Electrostatic Discharge on Linear Bipolar Integrated CircuitsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1977
- A Model for the Failure of Bipolar Silicon Integrated Circuits Subjected to Electrostatic Discharge8th Reliability Physics Symposium, 1974
- Control of Electrostatic Discharge Damage to Semiconductors8th Reliability Physics Symposium, 1974
- Failure Analysis of Surface Inversion8th Reliability Physics Symposium, 1973
- Avalanche degradation of hFEIEEE Transactions on Electron Devices, 1970
- Mechanisms of Channel Current Formation in Silicon P-N JunctionsFourth Annual Symposium on the Physics of Failure in Electronics, 1965
- Accumulation and Decay of Mobile Surface Charges on Insulating Layers and Relationship to Reliability of Silicon DevicesFourth Annual Symposium on the Physics of Failure in Electronics, 1965
- Mobile electric charges on insulating oxides with application to oxide covered silicon p-n junctionsSurface Science, 1964
- Silicon Transistor Failure Mechanisms Caused by Surface Charge SeparationsFourth Annual Symposium on the Physics of Failure in Electronics, 1963