Low-frequency piezoelectric-transducer applications of ZnO film
- 1 July 1974
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 25 (1) , 10-11
- https://doi.org/10.1063/1.1655257
Abstract
It is revealed that a high‐resistivity ZnO film highly oriented with the c axis perpendicular to a metal substrate surface can be used as a low‐frequency piezoelectric transducer which generates and detects compressional strain or stress perpendicular to the c axis, i.e., perpendicular to the film thickness through the piezoelectric tensor component e311 or d311. For example, tuning‐bar filters and a flat tuning‐fork filter are successfully composed of ZnO films and Elinvar‐alloy substrates whose resonant outputs are obtained even at frequencies lower than 100 kHz, and a piezoelectric microphone is composed of a ZnO film and a Ti membrane substrate.Keywords
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