Time-of-Flight Separation of Secondary Electrons Due to Metastable He and HeI Photon Beams Produced by Pulsed Hot-Cathode Discharge

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Abstract
Velocity distribution of He metastable atoms produced by hot-cathode discharge has been measured by a time-of-flight technique. It is comparable to Maxwell's velocity distribution characterized by the temperature around 1400 K. Secondary electrons from a target Si(111) surface ejected late from discharge pulses presented metastable-atom deexcitation spectra, whereas electrons ejected in coincidence with discharge pulses showed photoelectron spectra. The possible mechanism of metastable-atom deexcitation at the surface is described.